|hSʯӢƷ˾λڴʯӢƷɢ-BƸЖ|h|hNSʯӢVƷλஔߣ_99.9%ɴ,|h
ʯӢԼ
ˮƷ
ʯӢɰʯӢʯӢƷ,ڴꑵЈ~ռ95%ϡ
ҹ˾1998ʯӢƷaнλҪaƷʯӢʯӢpʯӢʯӢʯӢˮʯӢƬʯӢh(hun)ʯӢ塢ʯӢxNʯӢʯӢʯӢoʯӢ⾀гʯӢ⾀ԼNɫʯӢܵʯӢƷ
ʯӢܰNҎ(gu)UV⾀ʯӢܼpʯӢֱ2-180mmں0.5-8mmL10-3000mmBʯӢÓuV⾀oͨB۹SiO2_99.6%γߴ硢W(wn)᷀(wn)׃ԺͿ܃(yu)W^_93%Óuu10ppm^Óuu_5ppmmڸ߉cuȵuaƷ;֮¹ˇaƷıڰl(f)ܡӟhtܵV⾀ܞVVЌwк190-320nmL⾀mڭh(hun)ԴocV ⾀෴^253.7nmҲL⾀ǟo⾀ҪVڽеˮ̎ʳƷl(wi)Ț;
ʯӢƷʯӢʯӢݚʯӢʯӢˮסʯӢƬʯӢʯӢh(hun)ʯӢʯӢxNʯӢܡʯӢܵȮʯӢܺ͵ͳʯӢ⾀NɫͲʯӢʯӢֱ8-120mm֮gІ_p_ڡA^ƽ^κ͔Us߅ĥɰȼӹߜgԺüc,VʹˮOӟܡˮ̎uȮaƷͭh(hun)l(wi)IʯӢݚҎ(gu)8-180mmΠ(j)͑ҪݚϿԽëMŚߜԺҪJCJDH1-H7_߉cuȮaƷ;
ʯӢˮҪӡˢͰbӹI(y)---- UV̻, UV̻һNʮֿɿȡ՚
C\gĹ̻gӡˢͰbӹI(y)ѽõVͳʯӢ⾀ϵÇMg_l(f)®aƷЧY·fLrܮaL253.7nmȏ⾀ݗ䏊100W/cm2,ÓǺ(DNA)^Ɖã@ĚЧ,l(wi)gҎ(gu)ָ˵Ҫ
҂ĮaƷ|_ϣ˳Ҏ(gu)ҿԞ͑MЁDϼӹ
ҏSĮaƷ60Nև20Һ͵^(q)S\ź|棬пƼ(chung)l(f)չ҂÷dzŬȥM͑҂ø|̓rĮaƷ҂Ŀ͑҂Ŀ͑ڸЈϾиĸ